@inproceedings{inproceedings388d70d1, title = {Continuous electrical discharge as a source of methane plasma beam}, author = {Petraconi, G and Vasconcelos, S M B and Maciel, H. S. and Otani, C}, year = {1995}, publisher = {Sbv/Unicamp/Unb}, booktitle = {Congresso Brasileiro de Aplicacoes de Vacuo Na Industria e Na Ciencia} }