@inproceedings{inproceedings624b8832,
title   = {Dry etching of resist for three level resist process using statistical design of experiments},
author = {Mansano, Ronaldo Domingues and Verdonck, Patrick Bernard and Maciel, H. S.},
year = {1995},
publisher = {Instituto de Informatica da Ufrgs},
booktitle   = {Congress of the Brazilian Microelectronics Society}
}