@inproceedings{inproceedings37e72d4a,
title   = {Building of a pecvd reactor: details of the architecture and its influence on the characteristics of the a-'SI' : h films},
author = {Bottecchia, J P and Andrade, Adnei Melges de},
year = {1995},
publisher = {Sbv/Unicamp/Unb},
booktitle   = {Congresso Brasileiro de Aplicacoes de Vacuo Na Industria e Na Ciencia}
}