@article{articlef8c8ff6f,
title   = {Microvoids in diamond-like amorphous silicon carbide},
author = {Paez Carreño, Marcelo Nelson and Pereyra, Inés and Fantini, Márcia Carvalho de Abreu and Takahashi, H and Landers, R},
year = {1994},
doi = {10.1063/1.355835},
journal   = {Journal of Applied Physics}
}