@inproceedings{inproceedings072a9a12,
title   = {Actionometry and its applications on polysilicon etching in a magnetically confined reactor},
author = {Verdonck, Patrick Bernard and Degeyter, P and Swart, Jacobus Willibrordus},
year = {1992},
publisher = {Sbmicro/Epusp},
booktitle   = {Congresso da Sociedade Brasileira de Microeletronica}
}