@inbook{inbook6872ead8,
title   = {Silicon carbide clusters in silicon formed by carbon ions implantation},
author = {Escobar Forhan, Neisy Amparo and Pereyra, Inés},
year = {2003},
publisher = {Electrochemical Society},
journal   = {Microelectronic Technology and Devices SBMicro 2003}
}