Innovative low temperature plasma approach for deposition of alumina films - Battaglin, Felipe Augusto Darriba; Hosokawa, Ricardo Shindi; Cruz, Nilson Cristino da; Caseli, Luciano; Rangel, Elidiane Cipriano; Silva, Tiago Fiorini da; Tabacniks, Manfredo Harri (Materials Research, 2014)