Synchrotron radiation applied to real-time studies of the kinetics of growth of aluminum nitride thin multilayers - García Molleja, J; Burgi, Juan; Kellermann, G; Craievich, Aldo Felix; Neuenschwander, R; Jouan, P Y; Djouadi, M A; Piccoli, M; Bemporad, E; Felicis, D de; Feugeas J N (Journal of Physical Chemistry B, 2019)