Oxide-cladding aluminum nitride photonic crystal slab: design and investigation of material dispersion and fabrication induced disorder - Melo, Emerson Gonçalves de; Alayo Chávez, Marco Isaías; Carvalho, D. O; Ferlauto, Andre Santarosa; Armas Alvarado, Maria Elisia; Páez Carreño, Marcelo Nelson (Journal of Applied Physics, 2016)