Split CV mobility at low temperature operation of Ge pFinFETs fabricated with STI first and last processes - Oliveira, Alberto Vinicius de; Agopian, Paula Ghedini Der; Simoen, Eddy; Langer, Robert; Collaert, Nadine; Thean, Aaron; Claeys, Cor; Martino, João Antonio (Semiconductor Science and Technology, 2016)