Fabrication and characterization of aluminum nitride pedestal-type optical waveguide - Armas Alvarado, Maria Elisia; Pelegrini, Marcus Vinícius; Pereyra, Inés; Assumpção, Thiago Alexandre Alves de; Kassab, Luciana Reyes Pires; Alayo Chávez, Marco Isaías (Canadian Journal of Physics, 2014)