Effects of arrival rate and gas pressure on the chemical bonding and composition in titanium nitride films prepared on Si(100) substrates by ion beam and vapor deposition - Matsuoka, Masao; Isotani, Sadao; Mittani, Juan Carlos Ramirez; Chubaci, José Fernando Diniz; Ogata, K; Kuratani, N (Journal of Vacuum Science & Technology A, 2005)