Theoretical and experimental studies of the atomic structure of oxygen-rich amorphous silicon oxynitride films - Scopel, Wanderla Luis; Silva, Antonio Jose Roque da; Orellana, Walter M; Prado, Rogerio Junqueira; Fantini, Márcia Carvalho de Abreu; Fazzio, Adalberto; Pereyra, Inés (Physical Review B, 2003)