Low-temperature PECVD deposition of highly conductive microcrystalline silicon thin films - Nardes, Alexandre Mantovani; Andrade, Adnei Melges de; Fonseca, Fernando Josepetti; Dirani, Ely Antonio Tadeu; Muccillo, Reginaldo; Muccillo, Eliana Navarro dos Santos (Journal of Materials Science: materials in electronics, 2003)