Experimental and theoretical local structure of oxygen-rich amorphous silicon oxynitride - Scopel, Wanderla Luis; Fantini, Márcia Carvalho de Abreu; Prado, Rogerio Junqueira; Orellana, Walter M; Silva, Antonio Jose Roque da; Fazzio, Adalberto; Pereyra, Inés (Brazilian Workshop on Semiconductor Physics, 2003)