Influence of ion energy and arrival rate on x-ray crystallographic properties of thin Zr'O IND.X' films prepared on Si(111) substrate by ion-beam assisted deposition - Matsuoka, Masao; Isotani, Sadao; Chubaci, José Fernando Diniz; Miyake, S; Setsuhara, Y; Ogata, K; Kuratani, N (Journal of Applied Physics, 2000)