Effect of the substrate on the structural properties of low temperature microcrystalline silicon films - a Raman spectroscopy and atomic force microscopy investigation - Dirani, Ely Antonio Tadeu; Andrade, Adnei Melges de; Noda, Lúcia Kiyomi; Fonseca, Fernando Josepetti; Santos, Paulo Sérgio (Journal of Non-Crystalline Solids, 2000)