@inproceedings{inproceedings525f5b0c,
title   = {Pedestal architecture to manufacture TeO2-ZnO waveguides for the development of photonic devices to operate in the infrared region},
author = {Delboni, Filipe de Oliveira Pereira and Kumada, Daniel Kendji and Alayo Chávez, Marco Isaías and Kassab, Luciana Reyes Pires},
year = {2022},
doi = {10.1109/SBMICRO55822.2022.9880965},
publisher = {IEEE},
booktitle   = {Symposium on Microelectronics Technology (SBMICRO)}
}