@article{articlea86a889e,
title   = {Ultrathin nanocapacitor assembled via atomic layer deposition},
author = {Medina, Javier Alonso Lopez and Mejía-Salazar, Jorge Ricardo and Carvalho, William Orivaldo Faria and Mercado, Cesar Lopez and Nedev, Nicola Radnev and Gómez, Faustino Reyes and Oliveira Junior, Osvaldo Novais de and Sanchez, Mario Humberto Farias and Tiznado, Hugo},
year = {2024},
doi = {10.1088/1361-6528/ad7f5c},
journal   = {Nanotechnology}
}