@inproceedings{inproceedingsab78e21e, title = {Al source-drain schottky contact enabling N-type (Back Enhanced) BESOI MOSFET}, author = {Carvalho, Henrique Lanfredi and Rangel, Ricardo Cardoso and Sasaki, Kátia Regina Akemi and Agopian, Paula Ghedini Der and Yojo, Leonardo Shimizu and Martino, João Antonio}, year = {2022}, doi = {10.1109/SBMICRO55822.2022.9880960}, publisher = {IEEE}, booktitle = {Symposium on Microelectronics Technology} }