@inproceedings{inproceedingsf7fcc7b0,
title   = {MEMS-based ultrasound transducer: CMUT modeling and fabrication process},
author = {Oliveira, Victor Inacio de and Ibrahim, Ricardo Cury and Barros, Ettore Apolônio de and Mendonça, Lucas Gonçalves Dias and Lima, Bruno Luis Soares de and Piazzeta, Maria Helena de Oliveira and Gobbi, Angelo Luiz},
year = {2012},
doi = {10.1149/04901.0431ecst},
booktitle   = {International Symposium on Microelectronics Technology and Devices}
}