@inproceedings{inproceedingsde8e3bfb,
title   = {Hafnium aluminates deposited by atomic layer deposition: structural characterization by X-ray spectroscopy},
author = {Huanca, Danilo Roque and Christiano, Veronica and Adelmann, Christoph and Kellerman, Guinther and Verdonck, Patrick Bernard and Santos Filho, Sebastião Gomes dos},
year = {2012},
doi = {10.1149/04901.0383ecst},
booktitle   = {International Symposium on Microelectronics Technology and Devices}
}