@inproceedings{inproceedingsf54209d5, title = {Microlens array fabricated by gray-scale lithography maskless system}, author = {Cirino, Giuseppe Antonio and Lopera Aristizábal, Sergio and Montagnoli, Arlindo Neto and Mansano, Ronaldo Domingues and Gonçalves Neto, Luiz}, year = {2012}, doi = {10.1149/04901.0339ecst}, booktitle = {International Symposium on Microelectronics Technology and Devices} }