@inproceedings{inproceedings086a300b,
title   = {Simulation of PECVD SiO2 deposition using a cellular automata approach},
author = {Colombo, Fábio Belotti and Páez Carreño, Marcelo Nelson},
year = {2012},
doi = {10.1149/04901.0297ecst},
booktitle   = {International Symposium on Microelectronics Technology and Devices}
}