@article{article316c3ee7,
title   = {High spatial and temporal resolution film thickness planar sensor: comparison of geometries},
author = {Binilla Riaño, Adriana and Velasco Peña, Hugo Fernando and Hernandez Rodriguez, Oscar Mauricio and Bannwart, Antonio Carlos},
year = {2019},
doi = {10.1108/SR-08-2017-0177},
publisher = {Emerald},
journal   = {Sensor Review}
}