@inproceedings{inproceedings401678c5,
title   = {Analysis of the silicon film thickness and the ground plane influence on ultra thin buried oxide SOI nMOSFETs.},
author = {Itocazu, Vitor Tatsuo and Sonnenberg, Victor and Simoen, Eddy and Claeys, Cor and Martino, João Antonio},
year = {2012},
doi = {10.1149/04901.0511ecst},
booktitle   = {International Symposium on Microelectronics Technology and Devices}
}