@inproceedings{inproceedingse537139a,
title   = {Spacer length and tilt implantation influence on scaled UTBOX FD MOSFETS},
author = {Santos, Sara Dereste dos and Nicoletti, Talitha and Aoulaiche, Marc and Martino, João Antonio and Veloso, A and Jurczak, Malgorzata and Simoen, Eddy and Claeys, Cor},
year = {2012},
booktitle   = {International Symposium on Microelectronics Technology and Devices}
}