@inproceedings{inproceedings305e7c3b, title = {Biaxial stress simulation and electrical characterization of triple-gate SOI nMOSFETs.}, author = {Bühler, Rudolf Theoderich and Agopian, Paula Ghedini Der and Simoen, Eddy and Claeys, Cor and Martino, João Antonio}, year = {2012}, doi = {10.1149/04901.0145ecst}, booktitle = {International Symposium on Microelectronics Technology and Devices} }