@inproceedings{inproceedingse246ccc3,
title   = {On the importance of atom probe tomography for the development of new nanoscale devices},
author = {Santos, Thales Borrely dos and Huang, Tao-Yu and Yang, Yu-Chen and Goldman, Rachel S and Quivy, Alain André},
year = {2022},
doi = {10.1109/SBMICRO55822.2022.9881039},
publisher = {IEEE},
booktitle   = {Symposium on Microelectronics Technology and Devices (SBMicro)}
}