@inproceedings{inproceedings20c55265, title = {Effect of annealing temperature on indium tin oxynitride (ITON) electrical and optical characteristics}, author = {Medeiros, Marina Sparvoli de and Pederzini, Victor and Abe, Igor Yamamoto and Lopes, Alexandre and Pereyra, Inés and Onmori, Roberto Koji}, year = {2022}, publisher = {Sociedade Brasileira de Física}, booktitle = {Encontro de Outono da Sociedade Brasileira de Física} }