@article{articlee508952b, title = {Growth Evolution of AZO thin Films Deposited by Magnetron Sputtering at Room Temperature}, author = {Ramos, Raul and Chaves, M. and Martins, E. and Durrant, Steven F. and Rangel, Elidiane Cipriano and Silva, Tiago Fiorini da and Bortoleto, José Roberto Ribeiro}, year = {2021}, doi = {10.1590/1980-5373-MR-2021-0052}, journal = {American Journal of Materials Science and Engineering} }