@article{articlee12add6b, title = {On the relationship between the Raman scattering features and the Ti-related chemical states of TixOyNz films}, author = {Zanatta, Antonio Ricardo and Cemin, F. and Echeverrigaray, F. G. and Alvarez, F.}, year = {2021}, doi = {10.1016/j.jmrt.2021.06.090}, journal = {Journal of Materials Research and Technology} }