@article{article8cff7d76,
title   = {Influence of O2 flow rate on growth rate, composition and structure of RF-sputtered TiOx films},
author = {Iñiguez, A. C. and Campomanes, R. R. and Tabacniks, Manfredo Harri and Comedi, D.},
year = {2003},
journal   = {Revista Brasileira de Aplicações de Vácuo}
}