@article{articleeae41047,
title   = {Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films},
author = {Silva, Felipe Carneiro da and Tunes, Matheus Araujo and Edmondson, Philip D. and Lima, Nelson Batista de and Sagás, Julio Cesar and Fontana, Luis César and Schön, Cláudio Geraldo},
year = {2020},
doi = {10.1007/s42452-020-2617-3},
journal   = {SN Applied Sciences}
}