@article{articlef3f08431,
title   = {Mechanical properties of homogeneous and nitrogen graded TiN thin films},
author = {Silva, Felipe Carneiro da and Tunes, Matheus Araujo and Sagás, Julio Cesar and Fontana, Luis César and Lima, Nelson Batista de and Schön, Cláudio Geraldo},
year = {2020},
doi = {10.1016/j.tsf.2020.138268},
journal   = {Thin Solid Films}
}