@article{articlef717ef54, title = {Innovative low temperature plasma approach for deposition of alumina films}, author = {Battaglin, Felipe Augusto Darriba and Hosokawa, Ricardo Shindi and Cruz, Nilson Cristino da and Caseli, Luciano and Rangel, Elidiane Cipriano and Silva, Tiago Fiorini da and Tabacniks, Manfredo Harri}, year = {2014}, doi = {10.1590/1516-1439.283514}, journal = {Materials Research} }