@article{article20c2c41d, title = {High speed e-beam writing for large area photonic nanostructures: a choice of parameters}, author = {Kezheng, Li and Juntao, Li and Reardon, Christopher and Schuster, Christian and Yue, Wang and Triggs, Graham J. and Damnik, Niklas and Müenchenberger, Jana and Xuehua, Wang and Martins, Emiliano Rezende and Krauss, Thomas F.}, year = {2016}, doi = {10.1038/srep32945}, journal = {Scientific Reports} }