@inproceedings{inproceedings54537e3a, title = {Incubation effect study of GaN films under ultrafast laser pulse micromachining}, author = {Almeida, Gustavo Foresto Brito de and Nolasco, Lucas Konaka and Barbosa, Gustavo Rocha and Schneider, Andreas and Jaros, Angelina and Manglano-Clavero, Irene and Margenfeld, Christoph and Waag, Andreas and Voss, Tobias and Mendonça, Cleber Renato}, year = {2020}, publisher = {International Society for Optical Engineering - SPIE}, booktitle = {Photonics West} }