@article{article82fc5dd6,
title   = {Preparation and characterization of copper thin film obtained by metal plasma immersion ion implantation and deposition},
author = {Santos, Demetrio Jackson dos and Ito, Nathalie Minako and Oliveira, Mara Cristina Lopes de and Tavares, Lara Basilio and Antunes, Renato Altobelli and Salvadori, Maria Cecília Barbosa da Silveira},
year = {2018},
doi = {10.1016/j.tsf.2018.01.048},
journal   = {Thin Solid Films}
}