@article{article49f5ffaa,
title   = {Split CV mobility at low temperature operation of Ge pFinFETs fabricated with STI first and last processes},
author = {Oliveira, Alberto Vinicius de and Agopian, Paula Ghedini Der and Simoen, Eddy and Langer, Robert and Collaert, Nadine and Thean, Aaron and Claeys, Cor and Martino, João Antonio},
year = {2016},
doi = {10.1088/0268-1242/31/11/114002},
journal   = {Semiconductor Science and Technology}
}