@misc{misc7b342cf3, title = {Deposition rate influence in O3 sensing response of sputtered ZnO thin films}, author = {Colmenares, Nathaly and Correr, Wagner Rafael and Mastelaro, Valmor Roberto}, year = {2017}, doi = {10.3390/proceedings1040429}, publisher = {MDPI AG}, booktitle = {Eurosensors} }