@article{article3cdae09f, title = {Fabrication and characterization of aluminum nitride pedestal-type optical waveguide}, author = {Armas Alvarado, Maria Elisia and Pelegrini, Marcus Vinícius and Pereyra, Inés and Assumpção, Thiago Alexandre Alves de and Kassab, Luciana Reyes Pires and Alayo Chávez, Marco Isaías}, year = {2014}, doi = {10.1139/cjp-2013-0587}, journal = {Canadian Journal of Physics} }