@inproceedings{inproceedingsb7f8cb9f, title = {Femtosecond laser pulse train micromachining of silicon}, author = {Almeida, G. F. B. and Martins, R. J. and Otuka, A. J. G. and Siqueira, J. P. and Mendonça, Cleber Renato}, year = {2015}, publisher = {Canadian Photonic Industry Consortium - CPIC}, booktitle = {Photonics North Conference} }