@inproceedings{inproceedings8c32eb26, title = {Exploring silicon vibration resonance in micromachining applying temporal shaped femtosecond laser pulses}, author = {Almeida, G. F. B. and Martins, R. J. and Otuka, A. J. G. and Mendonça, Cleber Renato}, year = {2015}, publisher = {European Physical Society - EPS}, booktitle = {Conference on Lasers and Electro-Optics Europe - CLEO} }