@inproceedings{inproceedings2558baf4, title = {Study of sputtering processes, on metallic thin films, due to low energy ion implantation}, author = {Rosa, Edson P. and Delgado, Adriana O. and Moro, Marcos Vinicius and Trindade, Gustavo Ferraz and Silva, Tiago Fiorini da and Rodrigues, Cleber Lima and Rizzutto, Márcia de Almeida and Added, Nemitala and Tabacniks, Manfredo Harri}, year = {2013}, publisher = {SBF}, booktitle = {Reunião de Trabalho sobre Física Nuclear no Brasil} }