@inproceedings{inproceedingscc698c0d, title = {Study of sputtering processes, on metallic thin films, due to low energy ion implantation}, author = {Rosa, Edson P and Marcia A. Rizzutto, and Rodrigues, Cleber Lima and Trindade, Gustavo F and Silva, Tiago Fiorini da and Moro, Marcos Vinicius and Added, Nemitala and Tabacniks, Manfredo Harri}, year = {2013}, publisher = {SBF}, booktitle = {Reunião de Trabalho sobre Física Nuclear no Brasil} }