@article{article32268006, title = {Phase transformation and residual stress probed by Raman spectroscopy in diamond-turned single crystal silicon}, author = {Jasinevicius, Renato Goulart and Duduch, Jaime Gilberto and Montanari, Luciana and Pizani, Paulo Sérgio}, year = {2008}, doi = {10.1243/09544054JEM1161}, journal = {Proceedings of Institution of Mechanical Engineers. Part B. Journal of Engineering Manufacture} }