@inproceedings{inproceedings8847a22a, title = {Electrical and optical properties of aluminum oxide thin films produced by IBAD}, author = {Santos, Thales Borrely dos and Chubaci, José Fernando Diniz and Matsuoka, Masao and Watanabe, Shigueo and Hattori, Yocefu and Souza, Pedro O de and Gennary, Rosely F}, year = {2011}, publisher = {SBF}, booktitle = {Econtro de Física} }