@article{article3e3f7f9a,
title   = {Design and characterization of an RF Plasma Cleaner},
author = {Canal, Gustavo Paganini and Luna, H and Ruchko, L F and Galvão, Ricardo Magnus Osório},
year = {2010},
doi = {10.1590/s0103-97332010000100015},
journal   = {Brazilian Journal of Physics}
}