@inproceedings{inproceedings47444d8b,
title   = {Diffractive optical element applied to proximity exposure lithography exploring partial light coherence},
author = {Cirino, Giuseppe Antonio and Mansano, Ronaldo Domingues and Verdonck, Patrick Bernard and Gonçalves Neto, Luiz},
year = {2010},
publisher = {Optical Society of America},
booktitle   = {Latin America Optics & Photonics Conference}
}